PH3-A1 Phosphine Sensor (PH3 Sensor)

PH3-A1 Phosphine Sensor PH3 Sensor Description
Alphasense is expanding its line of electrochemical toxic gas sensors to address industry-specific requirements, including emissions monitoring, process safety, environmental monitoring and VOCs.

Phosphine (PH3)
Our Phosphine sensors cover all hydrides: Silane (SiH4), Diborane (B2H6), Germane (GeH4) and Phosphine (PH3) for the semiconductor industry.

PH3-A1 Phosphine Sensor PH3 Sensor Specifications
• Range: 10 ppm PH3 limit of performance warranty
• Sensitivity: 550 to 900 nA/ppm in 11ppm PH3
• Response time t90: < 25 (s) from zero to 5ppm PH3
• Resolution: < 0.03 RMS noise (ppm equivalent)
• Temperature range: -30 to 50°C
• Pressure range: 80 to 120 kPa
• Humidity range: 20 to 90 % rh continuous
• Weight: < 6g

Matched Transmitter board for PH3-A1 PH3 Sensor
4-20mA Digital Transmitter Board
• Factory calibration, custom-set for immediate use
• Digital zero, sensitivity and temperature compensation
• Digital and 4-20mA output
• Biased or unbiased operation
• Calibration and range change